Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371782 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masanori OKUNO, Masaya NAGATO, Toshihiko Yonejima | 2025-07-29 |
| 11066744 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Hideki Horita, Takashi Ozaki | 2021-07-20 |
| 9601326 | Method of manufacturing semiconductor device, including film having uniform thickness | Naonori Akae | 2017-03-21 |