Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365982 | Processing apparatus and exhaust system | Masanori OKUNO, Toshihiko Yonejima, Masakazu Sakata | 2025-07-22 |
| 11846025 | Substrate processing apparatus capable of adjusting inner pressure of process chamber thereof and method therefor | Takayuki Nakada | 2023-12-19 |
| 9548229 | Substrate processing apparatus, method of processing substrate, and method of manufacturing semiconductor device | — | 2017-01-17 |