Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163663 | Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device | Toshihiko Yonejima, Masanori OKUNO, Masakazu Sakata, Hiroki OKAMIYA, Takeshi Kasai +6 more | 2018-12-25 |
| 8734148 | Heat treatment apparatus and method of manufacturing semiconductor device | Keishin Yamazaki, Akira Hayashida, Masaaki Ueno, Manabu Izumi | 2014-05-27 |