Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816182 | Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium | Hideto Tateno, Yuichi Wada, Hiroshi Ashihara, Keishin Yamazaki, Takurou Ushida +1 more | 2017-11-14 |
| 8734148 | Heat treatment apparatus and method of manufacturing semiconductor device | Keishin Yamazaki, Akira Hayashida, Masaaki Ueno, Katsuaki NOGAMI | 2014-05-27 |
| 8394209 | High-strength steel sheet excellent in resistance to stress-relief annealing and in low-temperature joint toughness | Makoto Kariyazaki | 2013-03-12 |
| 7795157 | Substrate treatment device and manufacturing method of semiconductor device | Masato Terasaki, Shinya Morita | 2010-09-14 |