Issued Patents All Time
Showing 1–25 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10789141 | Information processing device and information processing method | — | 2020-09-29 |
| 9184069 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator | Masaaki Ueno, Masakazu Shimada, Masashi Sugishita, Toshimitsu Miyata, Kimio Kitamura +2 more | 2015-11-10 |
| 8838952 | Information processing apparatus with secure boot capability capable of verification of configuration change | — | 2014-09-16 |
| 8734148 | Heat treatment apparatus and method of manufacturing semiconductor device | Keishin Yamazaki, Masaaki Ueno, Manabu Izumi, Katsuaki NOGAMI | 2014-05-27 |
| 8507296 | Substrate processing method and film forming method | Masaaki Ueno, Masakazu Shimada, Takeo Hanashima, Haruo Morikawa | 2013-08-13 |
| 8501599 | Substrate processing apparatus and substrate processing method | Masaaki Ueno, Masakazu Shimada, Takeo Hanashima, Haruo Morikawa | 2013-08-06 |
| 8158911 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member | Masaaki Ueno, Masakazu Shimada, Kimio Kitamura, Kenji Tanaka, Jyunichi Nishihara | 2012-04-17 |
| 8148271 | Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method | Masaaki Ueno, Masakazu Shimada, Takenori Oka | 2012-04-03 |
| 8116618 | Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices | Masaaki Ueno, Masakazu Shimada, Masashi Sugishita, Toshimitsu Miyata, Kimio Kitamura +2 more | 2012-02-14 |
| 7863204 | Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure | Toshimitsu Miyata, Masakazu Shimada, Kimio Kitamura, Kenji Tanaka | 2011-01-04 |
| 7727780 | Substrate processing method and semiconductor manufacturing apparatus | Masashi Sugishita, Masaaki Ueno | 2010-06-01 |
| 7700054 | Substrate processing apparatus having gas side flow via gas inlet | Masaaki Ueno, Masakazu Shimada, Yukinori Aburatani, Tomoyuki Yamada, Seiyo Nakashima +1 more | 2010-04-20 |
| 6143409 | Polycarbodiimide resin-containing adhesive and flexible printed circuit board | Yasuyoshi Komoto, Michio Aizawa, Hitoshi Arai, Ken Yahata | 2000-11-07 |
| 5916675 | Polycarbodiimide resin-containing adhesive and flexible printed circuit board | Yasuyoshi Komoto, Michio Aizawa, Hitoshi Arai, Ken Yahata | 1999-06-29 |
| 5837801 | Method for preparing crosslinked polycarbodiimides | Ken Yahata, Hiroshi Miyoshi, Yasuyuki Takiguchi, Yasuyoshi Komoto | 1998-11-17 |
| 5821325 | Polycarbodiimide derivatives and method for preparing the same | Ken Yahata, Yasuyuki Takiguchi, Hiroshi Miyoshi, Yasuyoshi Komoto | 1998-10-13 |
| 5804257 | Polysilane compositions | Shigeru Mori, Eiichi Tabei | 1998-09-08 |
| 5770661 | Polycarbodiimide derivative and process for producing the same | Hiroshi Miyoshi, Ken Yahata, Yasuyoshi Komoto, Yasuyuki Takiguchi | 1998-06-23 |
| 5750636 | Process for the preparation of a high-molecular-weight polycarbodiimide solution | Yasuyoshi Komoto, Yasuyuki Takiguchi, Ken Yahata, Minoru Takamizawa | 1998-05-12 |
| 5750637 | Process for the preparation of a polycarbodiimide solution | Yasuyuki Takiguchi, Ken Yahata, Yasuyoshi Komoto, Minoru Takamizawa | 1998-05-12 |
| 5599892 | Preparation of polysilanes | — | 1997-02-04 |
| 5580912 | Polysilane compositions | Shigeru Mori | 1996-12-03 |
| 5296418 | Method for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymer | Yoshihumi Takeda | 1994-03-22 |
| 5237033 | Preparation of polysilanes | Eiichi Tabei, Shigeru Mori, Motoo Fukushima | 1993-08-17 |
| 5210058 | Method for preparing organic silazane polymers and method for preparing ceramics from the polymers | Yoshihumi Takeda, Toshinobu Ishihara | 1993-05-11 |