Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11359283 | Reaction tube structure and substrate processing apparatus | Tetsuya Marubayashi, Satoru Murata, Kosuke Takagi, Atsushi Hirano, Kiyoaki Yamada | 2022-06-14 |
| 8507296 | Substrate processing method and film forming method | Masaaki Ueno, Masakazu Shimada, Takeo Hanashima, Akira Hayashida | 2013-08-13 |
| 8501599 | Substrate processing apparatus and substrate processing method | Masaaki Ueno, Masakazu Shimada, Takeo Hanashima, Akira Hayashida | 2013-08-06 |