Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462401 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Naonori Akae, Masato Terasaki, Mikio Ohno | 2022-10-04 |
| 11450524 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Risa YAMAKOSHI, Takanori Ueno | 2022-09-20 |
| 11424473 | Fuel cell stack with support bar | Hideharu Naito, Satoshi Kasagami | 2022-08-23 |
| 11377730 | Substrate processing apparatus and furnace opening cover | Shinya Morita, Naonori Akae, Keishin Yamazaki | 2022-07-05 |
| 11359283 | Reaction tube structure and substrate processing apparatus | Tetsuya Marubayashi, Satoru Murata, Atsushi Hirano, Kiyoaki Yamada, Haruo Morikawa | 2022-06-14 |
| 11349143 | Fuel cell stack | Hideharu Naito | 2022-05-31 |
| 11316186 | Fuel cell system and fuel cell vehicle | Hideharu Naito | 2022-04-26 |
| 11299804 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus | Yuji Takebayashi, Atsushi Hirano, Ryuichi Nakagawa, Noriyuki Isobe | 2022-04-12 |
| 11041240 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Risa YAMAKOSHI, Hideki Horita, Atsushi Hirano | 2021-06-22 |
| 10914726 | Method for evaluating protrusion-forming ability of cell spheroids | Mayu Ogawa, Kazuhito GODA | 2021-02-09 |
| 10916792 | Fuel cell stack | Suguru Ohmori | 2021-02-09 |
| 10854907 | Fuel cell system | Kimiharu Mizusaki, Hideharu Naito, Masahiro Sato | 2020-12-01 |
| 10767260 | Substrate processing apparatus, vaporization system and mist filter | Atsushi Hirano | 2020-09-08 |
| 10693172 | Manufacturing method of fuel cell stack | Yusuke Nara, Yoshihito Kimura | 2020-06-23 |
| 10686206 | Exhaust apparatus | Kimiharu Mizusaki, Hideharu Naito, Yuki Imamura, Takaaki Mitsuoka, Yuki Makari | 2020-06-16 |
| 10640869 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Okuda, Masayoshi Minami, Yoshinobu Nakamura, Yukinao KAGA, Yuji Takebayashi | 2020-05-05 |
| 10411271 | Separator supporting structure | Shuhei Goto | 2019-09-10 |
| 10287680 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shintaro Kogura, Ryota Sasajima | 2019-05-14 |
| 10168520 | Microscope system and microscopy method | Hisao Kitagawa, Yoshihiro Shimada | 2019-01-01 |
| 10114209 | Microscope apparatus | — | 2018-10-30 |
| 10081868 | Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium | Ryota Sasajima, Shintaro Kogura, Naonori Akae, Risa YAMAKOSHI, Toshiki Fujino +2 more | 2018-09-25 |
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Takeo Hanashima, Mamoru Sueyoshi, Kotaro Konno +1 more | 2018-07-24 |
| 10026986 | Fuel cell stack | Tadashi Nishiyama, Yusuke Nara | 2018-07-17 |
| 9842393 | Cell evaluation method | Yoshihiro Shimada | 2017-12-12 |
| D783351 | Gas nozzle substrate processing apparatus | Toshiki Fujino, Ryota Sasajima | 2017-04-11 |