Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040179 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Takeo Hanashima | 2024-07-16 |
| 10968517 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shin SONE, Masaya NAGATO, Kenji Kameda | 2021-04-06 |
| 10062562 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Takaaki Noda | 2018-08-28 |
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Kosuke Takagi, Takeo Hanashima, Mamoru Sueyoshi +1 more | 2018-07-24 |
| 8624085 | Insect resistant protein and insect-resistance gene encoding the insect-resistant protein | Naoya Wasano | 2014-01-07 |