Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359314 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Ryota Horiike, Hiroki HATTA | 2025-07-15 |
| 11753716 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Hiroki HATTA, Takeo Hanashima, Koei KURIBAYASHI | 2023-09-12 |
| 10968517 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masaya NAGATO, Kenji Kameda, Kotaro Konno | 2021-04-06 |
| 10604842 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yushin Takasawa, Satoshi Shimamoto | 2020-03-31 |