Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359314 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Shin SONE, Ryota Horiike | 2025-07-15 |
| 11753716 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Takeo Hanashima, Koei KURIBAYASHI, Shin SONE | 2023-09-12 |
| 10290492 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yushin Takasawa, Satoshi Shimamoto | 2019-05-14 |