Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424437 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Tomiyuki SHIMIZU, Masaya NAGATO, Takashi Ozaki, Yoshitomo HASHIMOTO | 2025-09-23 |
| 12334336 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO | 2025-06-17 |
| 12288684 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka | 2025-04-29 |
| 12288683 | Method of manufacturing semiconductor device, substrate processing method, non-transitory computer-readable recording medium and substrate processing apparatus | Yasunobu Koshi, Kazuyuki Okuda, Yoshitomo HASHIMOTO | 2025-04-29 |
| 12009201 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka, Yoshitomo HASHIMOTO | 2024-06-11 |
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Kimihiko NAKATANI, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2024-05-07 |
| 11961733 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomiyuki SHIMIZU, Masaya NAGATO, Takashi Ozaki, Yoshitomo HASHIMOTO | 2024-04-16 |
| 11817314 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka | 2023-11-14 |
| 11664217 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tatsuru Matsuoka, Yoshitomo HASHIMOTO | 2023-05-30 |
| 11527402 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Kimihiko NAKATANI, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2022-12-13 |
| 11164741 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka | 2021-11-02 |
| 11056337 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka, Yoshitomo HASHIMOTO | 2021-07-06 |
| 10930491 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Hiroki Yamashita | 2021-02-23 |
| 10770287 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka, Yoshitomo HASHIMOTO | 2020-09-08 |
| 10607833 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Ozaki, Masato Terasaki, Risa YAMAKOSHI, Satoshi Shimamoto, Jiro Yugami +1 more | 2020-03-31 |
| 10604842 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yushin Takasawa, Satoshi Shimamoto, Shin SONE | 2020-03-31 |
| 10490400 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto | 2019-11-26 |
| 10340134 | Semiconductor device manufacturing method, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2019-07-02 |
| 10329366 | Ethylene/α-olefin copolymers and lubricating oils | Koji Endo, Tomoaki Mizukawa, Sadahiko Matsuura | 2019-06-25 |
| 10290492 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yushin Takasawa, Satoshi Shimamoto, Hiroki HATTA | 2019-05-14 |
| 10040884 | Ethylene/α-olefin copolymers and lubricating oils | Koji Endo, Tomoaki Mizukawa, Sadahiko Matsuura | 2018-08-07 |
| 9881789 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Yuji Urano | 2018-01-30 |
| 9741555 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Tatsuru Matsuoka | 2017-08-22 |
| 9691606 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Yoshinobu Nakamura, Ryota Sasajima | 2017-06-27 |
| 9620357 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Yuji Urano | 2017-04-11 |