Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288683 | Method of manufacturing semiconductor device, substrate processing method, non-transitory computer-readable recording medium and substrate processing apparatus | Kazuyuki Okuda, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2025-04-29 |
| 12195848 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yuji Urano, Masayoshi Minami | 2025-01-14 |
| 11618947 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yuji Urano, Masayoshi Minami | 2023-04-04 |
| 9970112 | Substrate processing apparatus and method of manufacturing semiconductor device | Kenichi Suzaki, Akihito Yoshino | 2018-05-15 |
| 9666430 | Method of manufacturing semiconductor device and substrate processing apparatus | Keigo NISHIDA, Kiyohiko Maeda | 2017-05-30 |
| 8999858 | Substrate processing apparatus and method of manufacturing semiconductor device | Kenichi Suzaki, Akihito Yoshino | 2015-04-07 |
| 8304328 | Manufacturing method of semiconductor device and substrate processing apparatus | Takahiro Maeda, Kiyohiko Maeda, Takashi Ozaki, Akihito Yoshino, Yuji Urano | 2012-11-06 |