Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211689 | Method of manufacturing semiconductor device capable of controlling film thickness distribution | Takashi Ozaki, Takafumi Sasaki | 2025-01-28 |
| 11965240 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | — | 2024-04-23 |
| 11827979 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kenichi Ishiguro, Takashi Ozaki | 2023-11-28 |
| 11594412 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Ozaki, Atsushi Hirano | 2023-02-28 |
| 10763410 | Light emitting device | — | 2020-09-01 |
| 10190827 | Condenser and turbine equipment | Jiro Kasahara, Taichi Nakamura, Katsuhiro Hotta | 2019-01-29 |
| 9666430 | Method of manufacturing semiconductor device and substrate processing apparatus | Yasunobu Koshi, Kiyohiko Maeda | 2017-05-30 |
| 6194665 | Film distinguished in coriona resistant characteristic and insulated wires, coils and motors comprising the film as an insulation material | Eiichirou Kuribayashi, Yoshihide Ohnari | 2001-02-27 |