Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195848 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yasunobu Koshi, Masayoshi Minami | 2025-01-14 |
| 11618947 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yasunobu Koshi, Masayoshi Minami | 2023-04-04 |
| 9895727 | Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium | Yoshinobu Nakamura, Masayoshi Minami, Masayuki Asai, Kazuyuki Okuda | 2018-02-20 |
| 9881789 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada | 2018-01-30 |
| 9856560 | Method for manufacturing semiconductor device and substrate processing apparatus | Kenji Kameda, Jie Wang | 2018-01-02 |
| 9620357 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada | 2017-04-11 |
| 9587308 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kenji Kameda, Ryuji Yamamoto | 2017-03-07 |
| D740769 | Boat for substrate processing apparatus | Kosuke Takagi, Kiyohiko Maeda, Naoki Matsumoto, Yasuaki Komae | 2015-10-13 |
| D739831 | Boat for substrate processing apparatus | Kosuke Takagi, Kiyohiko Maeda, Naoki Matsumoto, Yasuaki Komae | 2015-09-29 |
| 8741783 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kenji Kameda | 2014-06-03 |
| 8304328 | Manufacturing method of semiconductor device and substrate processing apparatus | Takahiro Maeda, Kiyohiko Maeda, Takashi Ozaki, Akihito Yoshino, Yasunobu Koshi | 2012-11-06 |
| 6777609 | Thermoelectric conversion material and thermoelectric conversion device | Noboru Ichinose, Shinsuke Arita, Toshiaki Ueno | 2004-08-17 |
| 6707249 | Electroluminescent device and oxide phosphor for use therein | Tadatsugu Minami, Toshihiro Miyata, Toshiaki Ueno | 2004-03-16 |