| 10837112 |
Substrate processing apparatus |
Takashi Nogami, Kenji Shirako |
2020-11-17 |
| 10403528 |
Substrate-processing apparatus and method of manufacturing semiconductor device |
Takashi Nogami, Tomoshi Taniyama, Shigeru Odake |
2019-09-03 |
| 9966289 |
Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium |
Daigi KAMIMURA, Shigeru Odake, Tomoshi Taniyama, Takashi Nogami, Osamu Morita |
2018-05-08 |
| D740769 |
Boat for substrate processing apparatus |
Kosuke Takagi, Kiyohiko Maeda, Yuji Urano, Naoki Matsumoto |
2015-10-13 |
| D739831 |
Boat for substrate processing apparatus |
Kosuke Takagi, Kiyohiko Maeda, Yuji Urano, Naoki Matsumoto |
2015-09-29 |
| D739832 |
Reaction tube |
Keishin Yamazaki, Masahiro Miyake, Shinya Morita, Kosuke Takagi, Naonori Akae +3 more |
2015-09-29 |
| D725055 |
Reaction tube |
Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Shinya Morita, Naonori Akae +1 more |
2015-03-24 |
| D720707 |
Reaction tube |
Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Shinya Morita, Naonori Akae +1 more |
2015-01-06 |
| D719114 |
Reaction tube |
Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Shinya Morita, Naonori Akae +1 more |
2014-12-09 |
| D711843 |
Reaction tube |
Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Shinya Morita, Naonori Akae +1 more |
2014-08-26 |