Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA, Tomoshi Taniyama, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2024-03-19 |
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Tomoshi Taniyama, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2022-09-20 |
| 11124873 | Substrate processing apparatus | Takayuki Nakada, Tomoshi Taniyama | 2021-09-21 |
| 10837112 | Substrate processing apparatus | Yasuaki Komae, Takashi Nogami | 2020-11-17 |
| 10590531 | Substrate processing apparatus, and method of manufacturing semiconductor device | Tomoshi Taniyama | 2020-03-17 |
| 10550468 | Substrate processing apparatus | Takayuki Nakada, Tomoshi Taniyama | 2020-02-04 |
| 9418881 | Substrate processing apparatus capable of switching control mode of heater | Shinobu Sugiura, Masaaki Ueno, Kazuo Tanaka, Masashi Sugishita, Hideto Yamaguchi | 2016-08-16 |
| 9222732 | Substrate processing apparatus and method of manufacturing semiconductor device | Takatomo Yamaguchi, Shuhei Saido, Akihiro Sato | 2015-12-29 |
| 9084298 | Substrate processing apparatus including shielding unit for suppressing leakage of magnetic field | Yukitomo HIROCHI, Akinori Tanaka, Akihiro Sato, Takeshi Itoh, Daisuke Hara +2 more | 2015-07-14 |
| 9074284 | Heat treatment apparatus | Masanao Fukuda, Akihiro Sato, Kazuhiro Morimitsu, Sadao Nakashima | 2015-07-07 |
| 8771416 | Substrate processing apparatus with an insulator disposed in the reaction chamber | Shuhei Saido, Takatomo Yamaguchi | 2014-07-08 |