Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398460 | Substrate processing apparatus, furnace opening assembly, substrate processing method, method of manufacturing semiconductor device and non-transitory tangible medium | Tatsuya NISHINO, Akinori Tanaka, Tomoshi Taniyama | 2025-08-26 |
| 12203169 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device and recording medium | — | 2025-01-21 |
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA, Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Takayuki Nakada +1 more | 2024-03-19 |
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Takayuki Nakada +1 more | 2022-09-20 |