Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398460 | Substrate processing apparatus, furnace opening assembly, substrate processing method, method of manufacturing semiconductor device and non-transitory tangible medium | Akinori Tanaka, Akira HORII, Tomoshi Taniyama | 2025-08-26 |
| 11295959 | Method of determining plasma abnormality, method of manufacturing semiconductor device, and substrate processing apparatus | Tsuyoshi Takeda | 2022-04-05 |
| 10796934 | Substrate processing apparatus, method of manufacturing semiconductor device and electrode fixing part | Tsuyoshi Takeda, Takashi Yahata | 2020-10-06 |
| 5226756 | Disk assembly | Shigeo Takahashi | 1993-07-13 |