Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293939 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | — | 2025-05-06 |
| 12123091 | Substrate processing apparatus and method of manufacturing semiconductor device | Takayuki Nakada, Takashi Nogami, Tomoshi Taniyama | 2024-10-22 |
| 12116666 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Ito, Tomoshi Taniyama | 2024-10-15 |
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2024-03-19 |
| 11823946 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | — | 2023-11-21 |
| 11555246 | Substrate processing apparatus and method of manufacturing semiconductor device | Hironori Shimada | 2023-01-17 |
| 11512392 | Substrate processing apparatus | Takayuki Nakada, Takashi Nogami, Tomoshi Taniyama | 2022-11-29 |
| 11456190 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama, Takashi Nogami | 2022-09-27 |
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2022-09-20 |
| D939459 | Boat for wafer processing apparatus | Hironori Shimada, Tomoshi Taniyama, Shuhei Saido, Takafumi Sasaki | 2021-12-28 |
| 11062918 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama, Takashi Nogami | 2021-07-13 |
| 11015248 | Substrate processing apparatus and method of manufacturing semiconductor device | Hironori Shimada | 2021-05-25 |
| 10998205 | Substrate processing apparatus and manufacturing method of semiconductor device | Tomoyasu Miyashita, Atsushi UMEKAWA | 2021-05-04 |
| 10636681 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama, Takashi Nogami | 2020-04-28 |
| 10529605 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takayuki Nakada | 2020-01-07 |
| 10508336 | Substrate processing apparatus | Takayuki Nakada, Takashi Nogami, Tomoshi Taniyama | 2019-12-17 |
| 9966289 | Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium | Shigeru Odake, Tomoshi Taniyama, Takashi Nogami, Osamu Morita, Yasuaki Komae | 2018-05-08 |