Issued Patents All Time
Showing 1–25 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344935 | Substrate processing apparatus, heat insulator assembly and method of manufacturing semiconductor device | Akihiro Sato, Kenta KASAMATSU | 2025-07-01 |
| 12241159 | Substrate processing apparatus and ceiling heater | Tetsuya Kosugi, Hitoshi Murata | 2025-03-04 |
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu +5 more | 2024-08-06 |
| 11967501 | Substrate processing apparatus and method of manufacturing semiconductor device | Hiroaki Hiramatsu, Takuro USHIDA | 2024-04-23 |
| 11685992 | Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device | Yusaku OKAJIMA, Takafumi Sasaki, Hidenari Yoshida, Mitsunori Ishisaka, Hidetoshi Mimura | 2023-06-27 |
| 11495477 | Substrate processing apparatus | Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2022-11-08 |
| 11384434 | Substrate processing apparatus and heater device | — | 2022-07-12 |
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi | 2022-06-14 |
| 11261528 | Substrate processing apparatus and method of manufacturing semiconductor device | Hiroaki Hiramatsu, Takuro USHIDA | 2022-03-01 |
| 11222796 | Substrate processing apparatus | Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2022-01-11 |
| 11219096 | Substrate processing apparatus and furnace opening assembly thereof | — | 2022-01-04 |
| D939459 | Boat for wafer processing apparatus | Hironori Shimada, Daigi KAMIMURA, Tomoshi Taniyama, Takafumi Sasaki | 2021-12-28 |
| D937385 | Return nozzle | Mitsunori Takeshita, Hidenari Yoshida, Yusaku OKAJIMA | 2021-11-30 |
| D928106 | Supporting column of insulation unit for semiconductor manufacturing apparatus | Yusaku OKAJIMA, Hidenari Yoshida | 2021-08-17 |
| D916037 | Cover of seal cap for reaction chamber for semiconductor | Yusaku OKAJIMA, Hidenari Yoshida, Takafumi Sasaki | 2021-04-13 |
| 10961625 | Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device | Takafumi Sasaki, Hidenari Yoshida, Yusaku OKAJIMA | 2021-03-30 |
| 10923366 | Substrate processing apparatus and method of manufacturing semiconductor device | Yusaku OKAJIMA, Hidenari Yoshida, Takafumi Sasaki | 2021-02-16 |
| 10731254 | Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device | Hidenari Yoshida, Yusaku OKAJIMA | 2020-08-04 |
| 10714362 | Substrate processing apparatus and method of manufacturing semiconductor device | — | 2020-07-14 |
| 10615061 | Substrate processing apparatus | Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2020-04-07 |
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi | 2020-03-24 |
| 10593572 | Substrate processing apparatus and method of manufacturing semiconductor device | — | 2020-03-17 |
| 10573535 | Substrate processing apparatus, lid cover and method of manufacturing semiconductor device | Mika Urushihara, Yusaku OKAJIMA | 2020-02-25 |
| D872037 | Cover of seal cap for reaction chamber for semiconductor manufacturing | Yusaku OKAJIMA, Hidenari Yoshida, Takafumi Sasaki | 2020-01-07 |
| 10453735 | Substrate processing apparatus, reaction tube, semiconductor device manufacturing method, and recording medium | Yusaku OKAJIMA, Hidenari Yoshida, Takafumi Sasaki | 2019-10-22 |