Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D855027 | Cover of seal cap for reaction chamber of semiconductor | Yusaku OKAJIMA, Hidenari Yoshida | 2019-07-30 |
| D847301 | Return nozzle | Hidenari Yoshida, Takafumi Sasaki | 2019-04-30 |
| D843958 | Reaction tube | Yusaku OKAJIMA, Hidenari Yoshida, Takafumi Sasaki, Hidetoshi Mimura | 2019-03-26 |
| D842823 | Reaction tube | Yusaku OKAJIMA, Hidenari Yoshida, Takafumi Sasaki, Hidetoshi Mimura | 2019-03-12 |
| D826185 | Ceiling heater for substrate processing apparatus | Tetsuya Kosugi, Takatomo Yamaguchi | 2018-08-21 |
| D825501 | Air flow controller for heater of substrate processing apparatus | Takatomo Yamaguchi, Tetsuya Kosugi | 2018-08-14 |
| D825502 | Heater for substrate processing apparatus | Tetsuya Kosugi, Takatomo Yamaguchi | 2018-08-14 |
| 9957616 | Substrate processing apparatus and heating unit | Hitoshi Murata, Yuichi Wada, Takashi Yahata, Hidenari Yoshida | 2018-05-01 |
| D813181 | Cover of seal cap for reaction chamber of semiconductor | Yusaku OKAJIMA, Mika Urushihara | 2018-03-20 |
| D795209 | Heater for semiconductor thermal process | Hitoshi Murata, Yuichi Wada, Takashi Yahata, Takatomo Yamaguchi | 2017-08-22 |
| D793975 | Heater for semiconductor thermal process | Hitoshi Murata, Yuichi Wada, Takashi Yahata, Hidenari Yoshida | 2017-08-08 |
| 9502237 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takatomo Yamaguchi | 2016-11-22 |
| 9365928 | Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium | Yuichi Wada, Takafumi Sasaki | 2016-06-14 |
| 9222732 | Substrate processing apparatus and method of manufacturing semiconductor device | Kenji Shirako, Takatomo Yamaguchi, Akihiro Sato | 2015-12-29 |
| 9082694 | Substrate processing apparatus, method for manufacturing substrate, and method for manufacturing semiconductor device | Daisuke Hara, Takafumi Sasaki | 2015-07-14 |
| 9062376 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer readable recording medium | — | 2015-06-23 |
| 9028614 | Substrate processing apparatus | Daisuke Hara, Takeshi Itoh, Masanao Fukuda, Takatomo Yamaguchi, Hiroaki Hiramatsu +1 more | 2015-05-12 |
| 8882923 | Substrate processing apparatus and method of manufacturing semiconductor device | Takatomo Yamaguchi, Daisuke Hara | 2014-11-11 |
| 8851886 | Substrate processing apparatus and method of manufacturing semiconductor device | Shinya Morita, Akihiro Sato, Akinori Tanaka, Shigeo Nakada, Takayuki Nakada +1 more | 2014-10-07 |
| 8771416 | Substrate processing apparatus with an insulator disposed in the reaction chamber | Takatomo Yamaguchi, Kenji Shirako | 2014-07-08 |