Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293930 | Substrate processing apparatus, method of manufacturing semiconductor device and heater | Shinobu Sugiura, Masaaki Ueno, Hitoshi Murata, Masashi Sugishita, Tomoyuki Yamada | 2025-05-06 |
| 12241159 | Substrate processing apparatus and ceiling heater | Hitoshi Murata, Shuhei Saido | 2025-03-04 |
| 12085338 | Heater, temperature control system, and processing apparatus | Masaaki Ueno, Shinobu Sugiura, Masashi Sugishita | 2024-09-10 |
| 12050138 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2024-07-30 |
| D980177 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Yuya YOSHIMURA, Takuto Shoji | 2023-03-07 |
| D976129 | Temperature sensor | Tokunobu Akao | 2023-01-24 |
| D962183 | Retainer plate of top heater for wafer processing furnace | Shinobu Sugiura, Takatomo Yamaguchi | 2022-08-30 |
| D962184 | Retainer plate of top heater for wafer processing furnace | Shinobu Sugiura, Takatomo Yamaguchi | 2022-08-30 |
| D959393 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Yuya YOSHIMURA, Takuto Shoji | 2022-08-02 |
| 11300456 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2022-04-12 |
| 11049742 | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | Hideto Yamaguchi, Masaaki Ueno | 2021-06-29 |
| 11043402 | Cooling unit, heat insulating structure, and substrate processing apparatus | Hitoshi Murata, Masaaki Ueno | 2021-06-22 |
| D918848 | Retainer of ceiling heater for semiconductor fabrication apparatus | Shinobu Sugiura, Takatomo Yamaguchi | 2021-05-11 |
| 10684174 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2020-06-16 |
| 10415136 | Substrate processing apparatus including heating and cooling device, and ceiling part included in the same | Motoya Takewaki, Masaaki Ueno | 2019-09-17 |
| D860420 | Electric furnace for substrate processing apparatus | Hitoshi Murata, Masaaki Ueno | 2019-09-17 |
| D860419 | Electric furnace for substrate processing apparatus | Hitoshi Murata, Masaaki Ueno | 2019-09-17 |
| 10418293 | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | Hideto Yamaguchi, Masaaki Ueno | 2019-09-17 |
| 10340151 | Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device | Motoya Takewaki, Masaaki Ueno, Hitoshi Murata | 2019-07-02 |
| 10228291 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2019-03-12 |
| D826185 | Ceiling heater for substrate processing apparatus | Takatomo Yamaguchi, Shuhei Saido | 2018-08-21 |
| D825502 | Heater for substrate processing apparatus | Takatomo Yamaguchi, Shuhei Saido | 2018-08-14 |
| D825501 | Air flow controller for heater of substrate processing apparatus | Takatomo Yamaguchi, Shuhei Saido | 2018-08-14 |
| D824440 | Heater of substrate processing apparatus | Motoya Takewaki | 2018-07-31 |
| D823363 | Heater of substrate processing apparatus | Motoya Takewaki | 2018-07-17 |