Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D980177 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Tetsuya Kosugi, Yuya YOSHIMURA | 2023-03-07 |
| D959393 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Tetsuya Kosugi, Yuya YOSHIMURA | 2022-08-02 |