Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293930 | Substrate processing apparatus, method of manufacturing semiconductor device and heater | Masaaki Ueno, Tetsuya Kosugi, Hitoshi Murata, Masashi Sugishita, Tomoyuki Yamada | 2025-05-06 |
| 12085338 | Heater, temperature control system, and processing apparatus | Tetsuya Kosugi, Masaaki Ueno, Masashi Sugishita | 2024-09-10 |
| D980177 | Ceiling heater for substrate processing apparatus | Tetsuya Kosugi, Yuya YOSHIMURA, Takuto Shoji | 2023-03-07 |
| D962183 | Retainer plate of top heater for wafer processing furnace | Tetsuya Kosugi, Takatomo Yamaguchi | 2022-08-30 |
| D962184 | Retainer plate of top heater for wafer processing furnace | Tetsuya Kosugi, Takatomo Yamaguchi | 2022-08-30 |
| D959393 | Ceiling heater for substrate processing apparatus | Tetsuya Kosugi, Yuya YOSHIMURA, Takuto Shoji | 2022-08-02 |
| 11198935 | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device | Yosuke KUWATA, Tomoyasu Miyashita, Atsushi UMEKAWA, Kazuhiro Kimura, Akihiko Hiratsuka +2 more | 2021-12-14 |
| D918848 | Retainer of ceiling heater for semiconductor fabrication apparatus | Tetsuya Kosugi, Takatomo Yamaguchi | 2021-05-11 |
| 9779970 | Heater supporting device | Tetsuya Kosugi, Hitoshi Murata, Masaaki Ueno | 2017-10-03 |
| 9698037 | Substrate processing apparatus | Seiyo Nakashima, Yuichi Matsuda, Takashi Nogami, Tomoyuki Yamada | 2017-07-04 |
| 9449849 | Method of manufacturing semiconductor device using meander-shaped heating element | Hitoshi Murata, Tetsuya Kosugi | 2016-09-20 |
| 9418881 | Substrate processing apparatus capable of switching control mode of heater | Masaaki Ueno, Kazuo Tanaka, Masashi Sugishita, Hideto Yamaguchi, Kenji Shirako | 2016-08-16 |
| 9064912 | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device | Hitoshi Murata, Tetsuya Kosugi, Masaaki Ueno | 2015-06-23 |
| 8847124 | Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the same | Hitoshi Murata, Tetsuya Kosugi | 2014-09-30 |
| 8535444 | Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part | Hitoshi Murata, Tetsuya Kosugi | 2013-09-17 |
| D652395 | Semiconductor manufacturing equipment | Masakazu Shimada, Takashi Nogami, Satoshi Aizawa, Seiyo Nakashima, Tomoyuki Yamada +2 more | 2012-01-17 |
| D651990 | Semiconductor manufacturing equipment | Masakazu Shimada, Takashi Nogami, Satoshi Aizawa, Seiyo Nakashima, Tomoyuki Yamada +2 more | 2012-01-10 |