Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970771 | Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device | Atsushi Morikawa, Takeshi Kasai, Kenichi Suzaki, Hirohisa Yamazaki, Yoshimasa NAGATOMI | 2024-04-30 |
| 11293096 | Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer | Atsushi Morikawa, Takeshi Kasai, Kenichi Suzaki, Hirohisa Yamazaki, Yoshimasa NAGATOMI | 2022-04-05 |
| 11031270 | Substrate processing apparatus, substrate holder and mounting tool | Atsushi Hirano, Yuji Takebayashi, Yukinao KAGA, Masanori Sakai | 2021-06-08 |
| 10876207 | Substrate processing apparatus, liquid precursor replenishment system, and method of manufacturing semiconductor device | Noriyuki Isobe, Kenichi Suzaki, Takeshi Kasai, Yoshitaka Kawahara | 2020-12-29 |
| 9437421 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yuji Takebayashi, Atsushi Morikawa | 2016-09-06 |
| 9184069 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator | Akira Hayashida, Masaaki Ueno, Masashi Sugishita, Toshimitsu Miyata, Kimio Kitamura +2 more | 2015-11-10 |
| 8876453 | Substrate processing apparatus and method of manufacturing semiconductor device | Yukinori Aburatani, Osamu Morita | 2014-11-04 |
| 8507296 | Substrate processing method and film forming method | Masaaki Ueno, Takeo Hanashima, Haruo Morikawa, Akira Hayashida | 2013-08-13 |
| 8501599 | Substrate processing apparatus and substrate processing method | Masaaki Ueno, Takeo Hanashima, Haruo Morikawa, Akira Hayashida | 2013-08-06 |
| 8303712 | Substrate processing apparatus, method for manufacturing semiconductor device, and process tube | Seiyo Nakashima, Tomoyuki Yamada | 2012-11-06 |
| 8158911 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member | Akira Hayashida, Masaaki Ueno, Kimio Kitamura, Kenji Tanaka, Jyunichi Nishihara | 2012-04-17 |
| 8148271 | Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method | Masaaki Ueno, Akira Hayashida, Takenori Oka | 2012-04-03 |
| 8116618 | Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices | Akira Hayashida, Masaaki Ueno, Masashi Sugishita, Toshimitsu Miyata, Kimio Kitamura +2 more | 2012-02-14 |
| D652395 | Semiconductor manufacturing equipment | Takashi Nogami, Satoshi Aizawa, Seiyo Nakashima, Tomoyuki Yamada, Shinobu Sugiura +2 more | 2012-01-17 |
| D651990 | Semiconductor manufacturing equipment | Takashi Nogami, Satoshi Aizawa, Seiyo Nakashima, Tomoyuki Yamada, Shinobu Sugiura +2 more | 2012-01-10 |
| 8030599 | Substrate processing apparatus, heating device, and semiconductor device manufacturing method | — | 2011-10-04 |
| 7863204 | Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure | Toshimitsu Miyata, Akira Hayashida, Kimio Kitamura, Kenji Tanaka | 2011-01-04 |
| 7700054 | Substrate processing apparatus having gas side flow via gas inlet | Akira Hayashida, Masaaki Ueno, Yukinori Aburatani, Tomoyuki Yamada, Seiyo Nakashima +1 more | 2010-04-20 |
| 6563634 | Microscope with aberration correcting function | Yoshihiro Shimada, Hisao Kitagawa | 2003-05-13 |
| 6043475 | Focal point adjustment apparatus and method applied to microscopes | Takashi Nagano, Takashi Yoneyama, Nobuyuki Nagasawa, Hideaki Endo, Jitsunari Kojima +2 more | 2000-03-28 |
| 6034815 | Laser scan microscope | — | 2000-03-07 |
| 6025956 | Incident-light fluorescence microscope | Takashi Nagano, Keiji Shimizu, Kenji Kawasaki, Kiyonobu Kurata | 2000-02-15 |
| 5879415 | Semiconductor fabricating apparatus, method for controlling oxygen concentration within load-lock chamber and method for generating native oxide | — | 1999-03-09 |
| 5735961 | Semiconductor fabricating apparatus, method for controlling oxygen concentration within load-lock chamber and method for generating native oxide | — | 1998-04-07 |
| 5516436 | Agent for treating textile materials | Juji Uchida, Takayoshi Kamano, Kuniaki Wakita, Masaaki Okawa | 1996-05-14 |