Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338529 | Substrate processing apparatus, process vessel, method of manufacturing semiconductor device and non-transitory tangible medium | Shinya Morita | 2025-06-24 |
| 12018373 | Substrate processing apparatus | — | 2024-06-25 |
| D982537 | Separator of substrate processing apparatus | Shinya Morita, Satoru Murata | 2023-04-04 |
| D981972 | Adiabatic plate for substrate processing appratus | Shinya Morita, Satoru Murata | 2023-03-28 |
| 10825697 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoyuki Yamada, Tadashi Kontani, Mikio Ohno | 2020-11-03 |
| 10163663 | Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device | Toshihiko Yonejima, Masanori OKUNO, Masakazu Sakata, Hiroki OKAMIYA, Takeshi Kasai +6 more | 2018-12-25 |
| 9698037 | Substrate processing apparatus | Yuichi Matsuda, Takashi Nogami, Shinobu Sugiura, Tomoyuki Yamada | 2017-07-04 |
| 9394607 | Substrate processing apparatus | Masaya NISHIDA, Ryota Sasajima, Tomoyasu Miyashita | 2016-07-19 |
| 8420167 | Method of manufacturing a semiconductor device | Yukinori Aburatani | 2013-04-16 |
| 8303712 | Substrate processing apparatus, method for manufacturing semiconductor device, and process tube | Tomoyuki Yamada, Masakazu Shimada | 2012-11-06 |
| 8277161 | Substrate processing apparatus and manufacturing method of a semiconductor device | Yukinori Aburatani | 2012-10-02 |
| D652395 | Semiconductor manufacturing equipment | Masakazu Shimada, Takashi Nogami, Satoshi Aizawa, Tomoyuki Yamada, Shinobu Sugiura +2 more | 2012-01-17 |
| D651990 | Semiconductor manufacturing equipment | Masakazu Shimada, Takashi Nogami, Satoshi Aizawa, Tomoyuki Yamada, Shinobu Sugiura +2 more | 2012-01-10 |
| D618638 | Reaction tube | — | 2010-06-29 |
| 7731797 | Substrate treating apparatus and semiconductor device manufacturing method | Tomoshi Taniyama, Kenichi Suzaki, Yoshikazu Takashima | 2010-06-08 |
| 7700054 | Substrate processing apparatus having gas side flow via gas inlet | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Yukinori Aburatani, Tomoyuki Yamada +1 more | 2010-04-20 |