Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289351 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoyuki Yamada, Shigenori TEZUKA | 2022-03-29 |
| 10825697 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoyuki Yamada, Seiyo Nakashima, Mikio Ohno | 2020-11-03 |
| 9373499 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Nobuo Ishimaru | 2016-06-21 |
| 9039912 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Nobuo Ishimaru | 2015-05-26 |
| 8875656 | Substrate processing apparatus | Tetsuo Yamamoto, Nobuhito Shima, Nobuo Ishimaru | 2014-11-04 |
| 8555808 | Substrate processing apparatus | Tetsuo Yamamoto | 2013-10-15 |
| 8544411 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Nobuo Ishimaru | 2013-10-01 |
| 8518182 | Substrate processing apparatus | Shizue Ogawa, Kazuyuki Toyoda, Motonari Takebayashi, Nobuo Ishimaru | 2013-08-27 |
| 8261692 | Substrate processing apparatus and reaction container | Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more | 2012-09-11 |
| 8047158 | Substrate processing apparatus and reaction container | Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more | 2011-11-01 |
| 8028652 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Nobuo Ishimaru | 2011-10-04 |
| 8020514 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Nobuo Ishimaru | 2011-09-20 |
| 7958842 | Substrate processing apparatus | Shizue Ogawa, Kazuyuki Toyoda, Motonari Takebayashi, Nobuo Ishimaru | 2011-06-14 |
| 7900580 | Substrate processing apparatus and reaction container | Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more | 2011-03-08 |
| 7861668 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Nobuo Ishimaru | 2011-01-04 |