Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986847 | Nozzle installation jig | Yoshitaka Abe, Hiromi Okada, Shinya Morita, Mamoru Ohishi | 2024-05-21 |
| 11633753 | Nozzle installation jig | Yoshitaka Abe, Hiromi Okada, Shinya Morita, Mamoru Ohishi | 2023-04-25 |
| 11535931 | Method of manufacturing semiconductor device, method of managing parts, and recording medium | Masaya NISHIDA, Akihiro Sato, Yosuke KUWATA, Kenichi Maeda | 2022-12-27 |
| 9169553 | Semiconductor device producing method | Masanori Sakai, Kazuyuki Okuda | 2015-10-27 |
| 8875656 | Substrate processing apparatus | Tadashi Kontani, Tetsuo Yamamoto, Nobuo Ishimaru | 2014-11-04 |
| 8261692 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuo Ishimaru +5 more | 2012-09-11 |
| 8047158 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuo Ishimaru +5 more | 2011-11-01 |
| 7900580 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuo Ishimaru +5 more | 2011-03-08 |
| 7713582 | Substrate processing method for film formation | Masanori Sakai, Toru Kagaya | 2010-05-11 |
| 7033937 | Apparatus and method for use in manufacturing a semiconductor device | Kazuyuki Toyoda, Osamu Kasahara, Tsutomu Tanaka, Mamoru Sueyoshi, Masanori Sakai | 2006-04-25 |
| 6576063 | Apparatus and method for use in manufacturing a semiconductor device | Kazuyuki Toyoda, Osamu Kasahara, Tsutomu Tanaka, Mamoru Sueyoshi, Masanori Sakai | 2003-06-10 |