Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9096928 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Naonori Akae | 2015-08-04 |
| 9023429 | Method of manufacturing semiconductor device and substrate processing apparatus | Yuichiro TAKESHIMA, Kazuyuki Toyoda, Junichi Tanabe, Katsuhiko Yamamoto, Hisashi Nomura | 2015-05-05 |
| 8575042 | Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus | Yosuke Ota, Yoshiro Hirose, Atsushi Sano, Kazuyuki Okuda, Kiyohiko Maeda | 2013-11-05 |
| 8293646 | Semiconductor device manufacturing method and substrate processing apparatus | Takashi Ozaki, Takaaki Noda, Kiyohiko Maeda, Atsushi Moriya, Minoru Sakamoto | 2012-10-23 |
| 7494941 | Manufacturing method of semiconductor device, and substrate processing apparatus | Kiyohiko Maeda, Akihiko Yoneda | 2009-02-24 |
| 7033937 | Apparatus and method for use in manufacturing a semiconductor device | Kazuyuki Toyoda, Tsutomu Tanaka, Mamoru Sueyoshi, Nobuhito Shima, Masanori Sakai | 2006-04-25 |
| 6894334 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2005-05-17 |
| 6576063 | Apparatus and method for use in manufacturing a semiconductor device | Kazuyuki Toyoda, Tsutomu Tanaka, Mamoru Sueyoshi, Nobuhito Shima, Masanori Sakai | 2003-06-10 |
| 6548847 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP EXPOSED THROUGH A CONNECTING HOLE, A TRANSITION-METAL FILM IN THE CONNECTING HOLE AND AN ALUMINUM WIRING STRIP THEREOVER, AND A TRANSITION-METAL NITRIDE FILM BETWEEN THE ALUMINUM WIRING STRIP AND THE TRANSITION-METAL FILM | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2003-04-15 |
| 6342412 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2002-01-29 |
| 6169324 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2001-01-02 |
| 6127255 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2000-10-03 |
| 5917211 | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Jun Murata, Yoshitaka Tadaki, Hiroko Kaneko, Toshihiro Sekiguchi, Hiroyuki Uchiyama +15 more | 1999-06-29 |
| 5811316 | Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-09-22 |
| 5780882 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-07-14 |
| 5773340 | Method of manufacturing a BIMIS | Takahiro Kumauchi, Takashi Hashimoto, Satoshi Yamamoto, Yoichi Tamaki, Takeo Shiba +1 more | 1998-06-30 |
| 5739589 | Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-04-14 |
| 5734188 | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Jun Murata, Yoshitaka Tadaki, Hiroko Kaneko, Toshihiro Sekiguchi, Hiroyuki Uchiyama +15 more | 1998-03-31 |
| 5670421 | Process for forming multilayer wiring | Eisuke Nishitani, Susumu Tsuzuku, Shigeru Kobayashi, Hiroki Nezu, Masakazu Ishino +1 more | 1997-09-23 |
| 5557147 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1996-09-17 |
| 5498768 | Process for forming multilayer wiring | Eisuke Nishitani, Susumu Tsuzuku, Shigeru Kobayashi, Hiroki Nezu, Masakazu Ishino +1 more | 1996-03-12 |
| 5468989 | Semiconductor integrated circuit device having an improved vertical bipolar transistor structure | Hirotaka Nishizawa, Seiichiro Azuma, Kazuaki Ootoshi, Masataka Miyama, Shuji Kawata +1 more | 1995-11-21 |
| 5331191 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1994-07-19 |
| 5264712 | Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same | Jun Murata, Yoshitaka Tadaki, Hiroko Kaneko, Toshihiro Sekiguchi, Hiroyuki Uchiyama +15 more | 1993-11-23 |
| 5202275 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1993-04-13 |