| 6894334 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
2005-05-17 |
| 6737318 |
Semiconductor integrated circuit device having switching misfet and capacitor element and method of producing the same, including wiring therefor and method of producing such wiring |
Jun Murata, Yoshitaka Tadaki, Isamu Asano, Mitsuaki Horiuchi, Hiroko Kaneko +6 more |
2004-05-18 |
| 6548847 |
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP EXPOSED THROUGH A CONNECTING HOLE, A TRANSITION-METAL FILM IN THE CONNECTING HOLE AND AN ALUMINUM WIRING STRIP THEREOVER, AND A TRANSITION-METAL NITRIDE FILM BETWEEN THE ALUMINUM WIRING STRIP AND THE TRANSITION-METAL FILM |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
2003-04-15 |
| 6342412 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
2002-01-29 |
| 6281071 |
Method of producing semiconductor integrated circuit device having switching MISFET and capacitor element including wiring therefor and method of producing such wiring |
Jun Murata, Yoshitaka Tadaki, Isamu Asano, Mitsuaki Horiuchi, Hiroko Kaneko +6 more |
2001-08-28 |
| 6169324 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
2001-01-02 |
| 6127255 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
2000-10-03 |
| 5930624 |
Method of producing semiconductor integrated circuit device having switching MISFET and capacitor element including wiring |
Jun Murata, Yoshitaka Tadaki, Isamu Asano, Mitsuaki Horiuchi, Hiroko Kaneko +6 more |
1999-07-27 |
| 5811316 |
Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
1998-09-22 |
| 5780882 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
1998-07-14 |
| 5753550 |
Semiconductor integrated circuit device having switching MISFET and capacitor element and method of producing the same, including wiring therefor and method of producing such wiring |
Jun Murata, Yoshitaka Tadaki, Isamu Asano, Mitsuaki Horiuchi, Hiroko Kaneko +6 more |
1998-05-19 |
| 5739589 |
Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
1998-04-14 |
| 5557147 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
1996-09-17 |
| 5504029 |
Method of producing semiconductor integrated circuit device having memory cell and peripheral circuit MISFETs |
Jun Murata, Yoshitaka Tadaki, Isamu Asano, Mitsuaki Horiuchi, Hiroko Kaneko +6 more |
1996-04-02 |
| 5331191 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
1994-07-19 |
| 5309392 |
Semiconductor IC device using ferroelectric material in data storage cells with light assisted state transition |
Fumio Ootsuka, Masakazu Sagawa |
1994-05-03 |
| 5286666 |
Method of producing semiconductor memory device |
Hisao Katto |
1994-02-15 |
| 5244820 |
Semiconductor integrated circuit device, method for producing the same, and ion implanter for use in the method |
Tadashi Kamata, Mitsuharu Honda, Nobuo Owada, Hizuru Yamaguchi |
1993-09-14 |
| 5202275 |
Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same |
Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii, Isamu Asano +22 more |
1993-04-13 |
| 5153685 |
Semiconductor integrated circuit device having switching MISFET and capacitor element and method of producing the same, including wiring therefor and method of producing such wiring |
Jun Murata, Yoshitaka Tadaki, Isamu Asano, Mitsuaki Horiuchi, Hiroko Kaneko +6 more |
1992-10-06 |
| 5134301 |
Ion implanting apparatus, having ion contacting surfaces made of high purity silicon, for fabricating semiconductor integrated circuit devices |
Tadashi Kamata, Mitsuharu Honda |
1992-07-28 |
| 5116775 |
Method of producing semiconductor memory device with buried barrier layer |
Hisao Katto |
1992-05-26 |
| 5051812 |
Semiconductor device and method for manufacturing the same |
Jin Onuki, Masayasu Nihei, Yasushi Koubuchi, Motoo Suwa, Shinichi Fukada +3 more |
1991-09-24 |