Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5244820 | Semiconductor integrated circuit device, method for producing the same, and ion implanter for use in the method | Mitsuharu Honda, Jun Sugiura, Nobuo Owada, Hizuru Yamaguchi | 1993-09-14 |
| 5134301 | Ion implanting apparatus, having ion contacting surfaces made of high purity silicon, for fabricating semiconductor integrated circuit devices | Jun Sugiura, Mitsuharu Honda | 1992-07-28 |