Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894334 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2005-05-17 |
| 6737318 | Semiconductor integrated circuit device having switching misfet and capacitor element and method of producing the same, including wiring therefor and method of producing such wiring | Jun Murata, Yoshitaka Tadaki, Isamu Asano, Jun Sugiura, Hiroko Kaneko +6 more | 2004-05-18 |
| 6548847 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP EXPOSED THROUGH A CONNECTING HOLE, A TRANSITION-METAL FILM IN THE CONNECTING HOLE AND AN ALUMINUM WIRING STRIP THEREOVER, AND A TRANSITION-METAL NITRIDE FILM BETWEEN THE ALUMINUM WIRING STRIP AND THE TRANSITION-METAL FILM | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2003-04-15 |
| 6445055 | Semiconductor integrated circuit device and manufacturing method thereof | Takayuki Iwasakii, Yusuke Takeuchi, Yoshiaki Yuyama, Shinichi Tanabe, Koki Sakai +4 more | 2002-09-03 |
| 6342412 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2002-01-29 |
| 6281071 | Method of producing semiconductor integrated circuit device having switching MISFET and capacitor element including wiring therefor and method of producing such wiring | Jun Murata, Yoshitaka Tadaki, Isamu Asano, Jun Sugiura, Hiroko Kaneko +6 more | 2001-08-28 |
| 6169324 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2001-01-02 |
| 6127255 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2000-10-03 |
| 5930624 | Method of producing semiconductor integrated circuit device having switching MISFET and capacitor element including wiring | Jun Murata, Yoshitaka Tadaki, Isamu Asano, Jun Sugiura, Hiroko Kaneko +6 more | 1999-07-27 |
| 5811316 | Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-09-22 |
| 5780882 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-07-14 |
| 5753550 | Semiconductor integrated circuit device having switching MISFET and capacitor element and method of producing the same, including wiring therefor and method of producing such wiring | Jun Murata, Yoshitaka Tadaki, Isamu Asano, Jun Sugiura, Hiroko Kaneko +6 more | 1998-05-19 |
| 5739589 | Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-04-14 |
| 5557147 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1996-09-17 |
| 5504029 | Method of producing semiconductor integrated circuit device having memory cell and peripheral circuit MISFETs | Jun Murata, Yoshitaka Tadaki, Isamu Asano, Jun Sugiura, Hiroko Kaneko +6 more | 1996-04-02 |
| 5331191 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1994-07-19 |
| 5202275 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1993-04-13 |
| 5153685 | Semiconductor integrated circuit device having switching MISFET and capacitor element and method of producing the same, including wiring therefor and method of producing such wiring | Jun Murata, Yoshitaka Tadaki, Isamu Asano, Jun Sugiura, Hiroko Kaneko +6 more | 1992-10-06 |
| 5068710 | Semiconductor device with multilayer base contact | Nobuo Owada, Masatoshi Tsuneoka, Tadayuki Taneoka | 1991-11-26 |
| 5060050 | Semiconductor integrated circuit device | Masatoshi Tsuneoka | 1991-10-22 |
| 4853102 | Sputtering process and an apparatus for carrying out the same | Hideki Tateishi, Hiroshi Saito, Shinji Sasaki | 1989-08-01 |
| 4830891 | Method for selective deposition of metal thin film | Eisuke Nishitani, Susumu Tsuzuku, Mitsuo Nakatani, Masaaki Maehara, Koichiro Mizukami | 1989-05-16 |
| 4547279 | Sputtering apparatus | Hideharu Kiyota | 1985-10-15 |