Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8357284 | Method for forming metal film | Akira Susaki, Tsutomu Nakada | 2013-01-22 |
| 8205625 | Apparatus and method for surface treatment of substrate, and substrate processing apparatus and method | Tsutomu Nakada, Akira Susaki, Shohei Shima, Yukio Fukunaga | 2012-06-26 |
| 7709394 | Substrate processing method and apparatus fabrication process of a semiconductor device | Hidenori Miyoshi, Kenji Ishikawa, Yukio Takigawa, Yoshihiro Nakata | 2010-05-04 |
| 4853102 | Sputtering process and an apparatus for carrying out the same | Hiroshi Saito, Shinji Sasaki, Mitsuaki Horiuchi | 1989-08-01 |
| 4675096 | Continuous sputtering apparatus | Tamotsu Shimizu, Susumu Aiuchi, Katsuhiro Iwashita, Hiroshi Nakamura | 1987-06-23 |
| 4610770 | Method and apparatus for sputtering | Hiroshi Saito, Shigeru Kobayashi, Susumu Aiuchi, Yasumichi Suzuki, Masao Sakata +2 more | 1986-09-09 |
| 4405435 | Apparatus for performing continuous treatment in vacuum | Tsuneaki Kamei, Katsuo Abe, Shigeru Kobayashi, Susumu Aiuchi, Masashi Nakatsukasa +2 more | 1983-09-20 |
| 4401539 | Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure | Katsuo Abe, Shigeru Kobayashi, Tsuneaki Kamei, Susumu Aiuchi | 1983-08-30 |