| 7020306 |
Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device |
Takenori Hirose, Hiroyuki Kojima, Mineo Nomoto |
2006-03-28 |
| 6693699 |
Image display device and its repairing method and apparatus |
Takashi Inoue, Shigenobu Maruyama, Toshio Asano, Takeo Sawaguchi, Rokuro Watanabe |
2004-02-17 |
| 6552771 |
Image display device and its repairing method and apparatus |
Takashi Inoue, Shigenobu Maruyama, Toshio Asano, Takeo Sawaguchi, Rokuro Watanabe |
2003-04-22 |
| 6539959 |
Cleaning apparatus for plate-like part and method thereof |
Noriyuki Ohroku, Yuichirou Tanaka, Yoichi Takahara, Tomonori Saeki, Hitoshi Oka +3 more |
2003-04-01 |
| RE33424 |
Apparatus and method for measuring the depth of fine engraved patterns |
Minori Noguchi, Toru Otsubo |
1990-11-06 |
| 4933565 |
Method and apparatus for correcting defects of X-ray mask |
Hiroshi Yamaguchi, Keiya Saito, Mitsuyoshi Koizumi, Akira Shimase, Satoshi Haraichi +2 more |
1990-06-12 |
| 4925755 |
Method of correcting defect in circuit pattern |
Hiroshi Yamaguchi, Keiya Saito, Akira Shimase, Satoshi Haraichi, Nobuyuki Akiyama +2 more |
1990-05-15 |
| 4840487 |
Measuring apparatus for etching pits |
Minori Noguchi, Toru Otsubo |
1989-06-20 |
| 4808258 |
Plasma processing method and apparatus for carrying out the same |
Toru Otsubo, Takashi Kamimura, Minoru Noguchi, Teru Fujii |
1989-02-28 |
| 4744660 |
Apparatus for measuring difference in shallow level |
Minori Noguchi, Toru Otsubo |
1988-05-17 |
| 4721553 |
Method and apparatus for microwave assisting sputtering |
Hiroshi Saito, Yasumichi Suzuki, Shuuzoo Sano, Tamotsu Shimizu |
1988-01-26 |
| 4675096 |
Continuous sputtering apparatus |
Hideki Tateishi, Tamotsu Shimizu, Katsuhiro Iwashita, Hiroshi Nakamura |
1987-06-23 |
| 4628531 |
Pattern checking apparatus |
Keiichi Okamoto, Kozo Nakahata, Yukio Matsuyama, Hideaki Doi, Mineo Nomoto |
1986-12-09 |
| 4615620 |
Apparatus for measuring the depth of fine engraved patterns |
Minori Noguchi, Toru Otsubo |
1986-10-07 |
| 4610770 |
Method and apparatus for sputtering |
Hiroshi Saito, Hideki Tateishi, Shigeru Kobayashi, Yasumichi Suzuki, Masao Sakata +2 more |
1986-09-09 |
| 4536419 |
Method for forming tapered films |
Hitoshi Kubota, Minoru Tanaka |
1985-08-20 |
| 4487678 |
Dry-etching apparatus |
Minori Noguchi, Toru Otsubo, Takashi Kamimura, Teru Fujii |
1984-12-11 |
| 4479848 |
Etching method and apparatus |
Toru Otsubo, Takashi Kamimura |
1984-10-30 |
| 4420233 |
Projecting apparatus |
Mineo Nomoto, Katsuhiro Iwashita, Toru Otsubo |
1983-12-13 |
| 4405435 |
Apparatus for performing continuous treatment in vacuum |
Hideki Tateishi, Tsuneaki Kamei, Katsuo Abe, Shigeru Kobayashi, Masashi Nakatsukasa +2 more |
1983-09-20 |
| 4401539 |
Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure |
Katsuo Abe, Shigeru Kobayashi, Tsuneaki Kamei, Hideki Tateishi |
1983-08-30 |
| 4391511 |
Light exposure device and method |
Nobuyuki Akiyama, Yukio Kembo, Yasuo Nakagawa, Mineo Nomoto |
1983-07-05 |