Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902683 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Shinichi Tachi, Katsuya Watanabe, Katsuhiko Mitani, Junichi Tanaka | 2005-06-07 |
| 6797529 | Processing apparatus with measuring unit and method | Tatehito Usui | 2004-09-28 |
| 6750977 | Apparatus for monitoring thickness of deposited layer in reactor and dry processing method | Tatehito Usui | 2004-06-15 |
| 6537832 | Measuring apparatus and film formation method | Tatehito Usui | 2003-03-25 |
| 6422172 | Plasma processing apparatus and plasma processing method | Jyunichi Tanaka, Toshio Masuda, Ichiro Sasaki, Tetsunori Kaji, Katsuya Watanabe | 2002-07-23 |
| 6245190 | Plasma processing system and plasma processing method | Toshio Masuda, Katsuhiko Mitani, Tetsunori Kaji, Jun'ichi Tanaka, Katsuya Watanabe +4 more | 2001-06-12 |
| 6197151 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Shinichi Tachi, Katsuya Watanabe, Katsuhiko Mitani, Junichi Tanaka | 2001-03-06 |
| 6158383 | Plasma processing method and apparatus | Seiichi Watanabe, Muneo Furuse, Hitoshi Tamura | 2000-12-12 |
| 6129806 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Shinichi Tachi, Katsuya Watanabe, Katsuhiko Mitani, Junichi Tanaka | 2000-10-10 |
| 5762814 | Plasma processing method and apparatus using plasma produced by microwaves | Kazuhiro Ohara, Ichirou Sasaki | 1998-06-09 |
| 5759424 | Plasma processing apparatus and processing method | Mitsuko Imatake, Ichiro Sasaki, Hitoshi Tamura, Takashi Kamimura | 1998-06-02 |
| 5531862 | Method of and apparatus for removing foreign particles | Yasumichi Suzuki, Shinji Sasaki, Kazuhiro Ohara, Ichirou Sasaki | 1996-07-02 |
| 5304277 | Plasma processing apparatus using plasma produced by microwaves | Kazuhiro Ohara, Ichirou Sasaki | 1994-04-19 |
| 5275977 | Insulating film forming method for semiconductor device interconnection | Yasuhiro Yamaguchi | 1994-01-04 |
| 5134965 | Processing apparatus and method for plasma processing | Mitsuo Tokuda, Junzou Azuma, Yasuhiro Yamaguchi, Ichirou Sasaki | 1992-08-04 |
| 4985109 | Apparatus for plasma processing | Mitsuo Tokuda, Yasuhiro Yamaguchi, Ichirou Sasaki, Kazuhiro Ohara, Hirohisa Usuami +1 more | 1991-01-15 |
| RE33424 | Apparatus and method for measuring the depth of fine engraved patterns | Minori Noguchi, Susumu Aiuchi | 1990-11-06 |
| 4840487 | Measuring apparatus for etching pits | Minori Noguchi, Susumu Aiuchi | 1989-06-20 |
| 4808258 | Plasma processing method and apparatus for carrying out the same | Susumu Aiuchi, Takashi Kamimura, Minoru Noguchi, Teru Fujii | 1989-02-28 |
| 4776918 | Plasma processing apparatus | Yasuhiro Yamaguchi, Takahiko Takeuchi, deceased | 1988-10-11 |
| 4744660 | Apparatus for measuring difference in shallow level | Minori Noguchi, Susumu Aiuchi | 1988-05-17 |
| 4622094 | Method of controlling dry etching by applying an AC voltage to the workpiece | — | 1986-11-11 |
| 4615620 | Apparatus for measuring the depth of fine engraved patterns | Minori Noguchi, Susumu Aiuchi | 1986-10-07 |
| 4487678 | Dry-etching apparatus | Minori Noguchi, Susumu Aiuchi, Takashi Kamimura, Teru Fujii | 1984-12-11 |
| 4479848 | Etching method and apparatus | Susumu Aiuchi, Takashi Kamimura | 1984-10-30 |