Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902683 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Shinichi Tachi, Toru Otsubo, Katsuya Watanabe, Junichi Tanaka | 2005-06-07 |
| 6245190 | Plasma processing system and plasma processing method | Toshio Masuda, Tetsunori Kaji, Jun'ichi Tanaka, Katsuya Watanabe, Shigeru Shirayone +4 more | 2001-06-12 |
| 6197151 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Shinichi Tachi, Toru Otsubo, Katsuya Watanabe, Junichi Tanaka | 2001-03-06 |
| 6129806 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Shinichi Tachi, Toru Otsubo, Katsuya Watanabe, Junichi Tanaka | 2000-10-10 |
| 5668402 | Semiconductor device | Kazuhiro Mochizuki, Shigeo Goto, Chushirou Kusano, Masahiko Kawata, Hiroshi Masuda +1 more | 1997-09-16 |
| 5401357 | Dry etching method | Hidekazu Okuhira, Tetsuo Ono, Susumu Hiraoka, Keizo Suzuki, Junji Shigeta +4 more | 1995-03-28 |
| 5381027 | Semiconductor device having a heterojunction and a two dimensional gas as an active layer | Toshiyuki Usagawa, Kenji Hiruma, Masahiko Kawata, Shigeo Goto, Masao Yamane +3 more | 1995-01-10 |
| 5296733 | Hetero junction bipolar transistor with improved electrode wiring contact region | Chushiroh Kusano, Hiroshi Masuda, Kazuhiro Mochizuki, Masaru Miyazaki, Masahiko Kawata +1 more | 1994-03-22 |
| 5258631 | Semiconductor device having a two-dimensional electron gas as an active layer | Toshiyuki Usagawa, Kenji Hiruma, Masahiko Kawata, Shigeo Goto, Masao Yamane +3 more | 1993-11-02 |
| 5019524 | Method of manufacturing a heterojunction bipolar transistor | Tomonori Tanoue, Chushiro Kusano, Masayoshi Kobayashi, Susumu Takahashi | 1991-05-28 |
| 5017517 | Method of fabricating semiconductor device using an Sb protection layer | Kazuhiro Mochizuki, Tomonori Tanoue, Chushirou Kusano, Hiroshi Masuda | 1991-05-21 |
| 4983532 | Process for fabricating heterojunction bipolar transistors | Tomonori Tanoue, Chushirou Kusano, Susumu Takahashi, Masayoshi Saito, Hiroshi Miyazaki +1 more | 1991-01-08 |
| 4979009 | Heterojunction bipolar transistor | Chushiro Kusano, Tomonori Tanoue | 1990-12-18 |