Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191121 | Plasma processing apparatus | Kazuyuki Ikenaga, Masaki Ishiguro, Masahiro Sumiya | 2025-01-07 |
| 12112925 | Plasma processing apparatus | Masaki Ishiguro, Masahiro Sumiya, Kazuyuki Ikenaga, Tomoyuki Tamura | 2024-10-08 |
| 11664233 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Masahiro Sumiya, Tomoyuki Tamura, Kazuyuki Ikenaga | 2023-05-30 |
| 11424108 | Plasma processing apparatus | Kazuyuki Ikenaga, Masaki Ishiguro, Masahiro Sumiya | 2022-08-23 |
| 11315792 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Masahiro Sumiya, Kazuyuki Ikenaga, Tomoyuki Tamura | 2022-04-26 |
| 11257661 | Plasma processing apparatus | Masaki Ishiguro, Masahiro Sumiya, Kazuyuki Ikenaga, Tomoyuki Tamura | 2022-02-22 |
| 11107694 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Masahiro Sumiya, Tomoyuki Tamura, Kazuyuki Ikenaga | 2021-08-31 |
| 10490412 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Masahiro Sumiya, Tomoyuki Tamura, Kazuyuki Ikenaga | 2019-11-26 |
| 10395935 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Masahiro Sumiya, Kazuyuki Ikenaga, Tomoyuki Tamura | 2019-08-27 |
| 9941133 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Masahiro Sumiya, Kazuyuki Ikenaga, Tomoyuki Tamura | 2018-04-10 |
| 9607874 | Plasma processing apparatus | Hiroyuki Kobayashi, Tomoyuki Tamura, Masaki Ishiguro, Kazuyuki Ikenaga, Makoto Nawata | 2017-03-28 |
| 7947189 | Vacuum processing apparatus and vacuum processing method of sample | Tooru Aramaki, Tsunehiko Tsubone, Tadamitsu Kanekiyo, Hideki Kihara | 2011-05-24 |
| 6503364 | Plasma processing apparatus | Toshio Masuda, Tatehito Usui, Kazue Takahashi, Mitsuru Suehiro | 2003-01-07 |
| 6245190 | Plasma processing system and plasma processing method | Toshio Masuda, Katsuhiko Mitani, Tetsunori Kaji, Jun'ichi Tanaka, Katsuya Watanabe +4 more | 2001-06-12 |