Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387921 | Apparatus diagnostic apparatus, apparatus diagnostic method, plasma processing apparatus and semiconductor device manufacturing system | Shota Umeda, Yoshito Kamaji, Kenji Tamaki | 2025-08-12 |
| 12368031 | Plasma processing method | Kosa Hirota, Koichi Nakaune, Nanako Tamari, Satomi Inoue, Shigeru Nakamoto | 2025-07-22 |
| 12191121 | Plasma processing apparatus | Kazuyuki Ikenaga, Masaki Ishiguro, Shigeru Shirayone | 2025-01-07 |
| 12154765 | Plasma processing apparatus and plasma processing method | Nanako Tamari, Kosa Hirota, Masahiro Nagatani | 2024-11-26 |
| 12148633 | Plasma processing apparatus and method for releasing sample | Masaki Ishiguro | 2024-11-19 |
| 12112925 | Plasma processing apparatus | Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2024-10-08 |
| 12080529 | Plasma processing apparatus and prediction method of the condition of plasma processing apparatus | Yoshito Kamaji | 2024-09-03 |
| 12050455 | State prediction apparatus and semiconductor manufacturing apparatus | Masaki Ishiguro | 2024-07-30 |
| 12040167 | Diagnosis apparatus, plasma processing apparatus and diagnosis method | Shota Umeda, Kenji Tamaki, Masaki Ishiguro | 2024-07-16 |
| 11742214 | Plasma processing method | Junya Sasaki | 2023-08-29 |
| 11664233 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Shigeru Shirayone, Tomoyuki Tamura, Kazuyuki Ikenaga | 2023-05-30 |
| 11538671 | Plasma processing apparatus and data analysis apparatus | Ryoji Asakura, Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2022-12-27 |
| 11424108 | Plasma processing apparatus | Kazuyuki Ikenaga, Masaki Ishiguro, Shigeru Shirayone | 2022-08-23 |
| 11355324 | Plasma processing method | Kosa Hirota, Koichi Nakaune, Nanako Tamari, Satomi Inoue, Shigeru Nakamoto | 2022-06-07 |
| 11315792 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2022-04-26 |
| 11257661 | Plasma processing apparatus | Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2022-02-22 |
| 11107664 | Plasma processing apparatus and prediction apparatus of the condition of plasma processing apparatus | Yoshito Kamaji | 2021-08-31 |
| 11107694 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Shigeru Shirayone, Tomoyuki Tamura, Kazuyuki Ikenaga | 2021-08-31 |
| 10886110 | Plasma processing apparatus and prediction method of the condition of plasma processing apparatus | Yoshito Kamaji | 2021-01-05 |
| 10825700 | Plasma processing apparatus and method for releasing sample | Masaki Ishiguro | 2020-11-03 |
| 10510519 | Plasma processing apparatus and data analysis apparatus | Ryoji Asakura, Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2019-12-17 |
| 10490412 | Method for releasing sample and plasma processing apparatus using same | Masaki Ishiguro, Shigeru Shirayone, Tomoyuki Tamura, Kazuyuki Ikenaga | 2019-11-26 |
| 10395935 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2019-08-27 |
| 10184173 | Plasma processing method | Takahiro Yonemoto, Yoshito Kamaji, Junya Sasaki | 2019-01-22 |
| 9960031 | Plasma processing apparatus and plasma processing method | Motohiro Tanaka | 2018-05-01 |