Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368031 | Plasma processing method | Kosa Hirota, Masahiro Sumiya, Koichi Nakaune, Satomi Inoue, Shigeru Nakamoto | 2025-07-22 |
| 12154765 | Plasma processing apparatus and plasma processing method | Kosa Hirota, Masahiro Sumiya, Masahiro Nagatani | 2024-11-26 |
| 11355324 | Plasma processing method | Kosa Hirota, Masahiro Sumiya, Koichi Nakaune, Satomi Inoue, Shigeru Nakamoto | 2022-06-07 |
| 10460913 | Plasma processing apparatus and plasma processing method | Hitoshi Tamura, Naoki Yasui | 2019-10-29 |
| 9741579 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Naoki Yasui | 2017-08-22 |