Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658011 | Plasma processing apparatus | Yoshiharu Inoue, Tetsuo Ono, Masaki Fujii, Masakazu Miyaji | 2023-05-23 |
| 11004658 | Plasma processing apparatus and plasma processing method | Naoki Yasui, Yasuo Ohgoshi | 2021-05-11 |
| 10727088 | Plasma processing apparatus and plasma processing method | Yasuo Ohgoshi, Yuuzou Oohirabaru, Tetsuo Ono | 2020-07-28 |
| 10600619 | Plasma processing apparatus | Yoshiharu Inoue, Tetsuo Ono, Masaki Fujii, Masakazu Miyaji | 2020-03-24 |
| 10559481 | Plasma processing apparatus and plasma processing method | Yasuo Ohgoshi, Yuuzou Oohirabaru, Tetsuo Ono | 2020-02-11 |
| 10522331 | Plasma processing apparatus | Yasuo Ohgoshi, Yuuzou Oohirabaru, Tetsuo Ono | 2019-12-31 |
| 10192718 | Plasma processing apparatus and plasma processing method | Naoki Yasui, Yasuo Ohgoshi | 2019-01-29 |
| 10037909 | Plasma processing apparatus | Tooru Aramaki, Kenetsu Yokogawa | 2018-07-31 |
| 9741579 | Plasma processing apparatus and plasma processing method | Nanako Tamari, Naoki Yasui | 2017-08-22 |
| 9514967 | Plasma processing apparatus | Yasuo Ohgoshi, Yuuzou Oohirabaru, Tetsuo Ono | 2016-12-06 |
| 9502217 | Plasma processing apparatus and plasma processing method | Shunsuke Kanazawa, Naoki Yasui, Yasuo Ohgoshi | 2016-11-22 |
| 9349603 | Plasma processing method | Yoshiharu Inoue, Tetsuo Ono, Masaki Fujii, Masakazu Miyaji | 2016-05-24 |
| 9336999 | Plasma processing apparatus and plasma processing method | Naoki Yasui, Yasuo Ohgoshi | 2016-05-10 |
| 9305803 | Plasma processing apparatus and plasma processing method | Yasuo Ohgoshi, Yuuzou Oohirabaru, Tetsuo Ono | 2016-04-05 |
| 8992724 | Plasma processing apparatus and plasma processing method | Shunsuke Kanazawa, Naoki Yasui, Yasuo Ohgoshi | 2015-03-31 |
| 8889024 | Plasma etching method | Tomoyuki Watanabe, Mamoru Yakushiji, Tetsuo Ono | 2014-11-18 |
| 8828254 | Plasma processing method | Yoshiharu Inoue, Tetsuo Ono, Masaki Fujii, Masakazu Miyaji | 2014-09-09 |
| 8801951 | Plasma processing method | Yoshiharu Inoue, Tsuyoshi Matsumoto, Tetsuo Ono, Tadamitsu Kanekiyo, Mamoru Yakushiji +1 more | 2014-08-12 |
| 8741166 | Plasma etching method | Tomoyuki Watanabe, Mamoru Yakushiji, Tetsuo Ono | 2014-06-03 |
| 8580131 | Plasma etching method | Tomoyuki Watanabe, Mamoru Yakushiji, Tetsuo Ono | 2013-11-12 |