Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727088 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Tetsuo Ono | 2020-07-28 |
| 10559481 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Tetsuo Ono | 2020-02-11 |
| 10522331 | Plasma processing apparatus | Yasuo Ohgoshi, Michikazu Morimoto, Tetsuo Ono | 2019-12-31 |
| 9831096 | Plasma processing method and plasma processing apparatus | Hiromitsu Terauchi, Tsutomu Iida | 2017-11-28 |
| 9514967 | Plasma processing apparatus | Yasuo Ohgoshi, Michikazu Morimoto, Tetsuo Ono | 2016-12-06 |
| 9305803 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Tetsuo Ono | 2016-04-05 |
| 7585383 | Vacuum processing apparatus | Akira Ueda | 2009-09-08 |
| 7353076 | Vacuum processing method and vacuum processing apparatus | Nobuo Nagayasu, Hideki Kihara, Michinori Kawaguchi | 2008-04-01 |