Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7353076 | Vacuum processing method and vacuum processing apparatus | Hideki Kihara, Michinori Kawaguchi, Yuuzou Oohirabaru | 2008-04-01 |
| 7296783 | Vacuum processing apparatus | Hideki Kihara, Tsunehiko Tsubone | 2007-11-20 |
| D546354 | Semiconductor manufacturing apparatus | Hideki Kihara, Minoru Soraoka, Yuzo Ohirabaru | 2007-07-10 |