Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620399 | Load port | Hidenobu Tanimura, Shinji Yokoyama, Noriyoshi Toyoda | 2017-04-11 |
| 8460467 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Hideki Kihara, Susumu Tauchi | 2013-06-11 |
| 7976632 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Hideki Kihara, Susumu Tauchi | 2011-07-12 |
| 7833382 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Hideki Kihara, Susumu Tauchi | 2010-11-16 |
| 7828928 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Hideki Kihara, Susumu Tauchi | 2010-11-09 |
| 7347656 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2008-03-25 |
| 7335277 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Hideki Kihara, Susumu Tauchi | 2008-02-26 |
| 7247207 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Hideki Kihara, Susumu Tauchi | 2007-07-24 |
| D546354 | Semiconductor manufacturing apparatus | Hideki Kihara, Yuzo Ohirabaru, Nobuo Nagayasu | 2007-07-10 |
| 7201551 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2007-04-10 |
| 6962472 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2005-11-08 |
| 6895685 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2005-05-24 |
| 6752579 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2004-06-22 |
| 6752580 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2004-06-22 |
| 6705828 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2004-03-16 |
| 6672819 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2004-01-06 |
| 6526330 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2003-02-25 |
| 6519504 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2003-02-11 |
| 6430469 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2002-08-06 |
| 6253117 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2001-06-26 |
| 6188935 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 2001-02-13 |
| 5861601 | Microwave plasma processing apparatus and method | Yoshiaki Sato, Mitsuru Katamoto, Hironobu Kawahara, Tsuyoshi Umemoto, Hideki Kihara +3 more | 1999-01-19 |
| 5855726 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Ken Yoshioka, Yoshinao Kawasaki | 1999-01-05 |
| 4936967 | Method of detecting an end point of plasma treatment | Shoji Ikuhara, Keiji Tada, Yoshinao Kawasaki, Katsuyoshi Kudo | 1990-06-26 |
| 4453757 | Wafer gripping device | — | 1984-06-12 |