Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8460467 | Vacuum processing apparatus | Akitaka Makino, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2013-06-11 |
| 7976632 | Vacuum processing apparatus | Akitaka Makino, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2011-07-12 |
| 7833382 | Vacuum processing apparatus | Akitaka Makino, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2010-11-16 |
| 7828928 | Vacuum processing apparatus | Akitaka Makino, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2010-11-09 |
| 7335277 | Vacuum processing apparatus | Akitaka Makino, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2008-02-26 |
| 7247207 | Vacuum processing apparatus | Akitaka Makino, Minoru Soraoka, Hideki Kihara, Susumu Tauchi | 2007-07-24 |
| 7125730 | Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same | Tsutomu Iida, Tsuyoshi Umemoto, Makoto Kashibe | 2006-10-24 |
| 7025895 | Plasma processing apparatus and method | Makoto Kashibe | 2006-04-11 |
| 6713885 | Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same | Tsutomu Iida, Tsuyoshi Umemoto, Makoto Kashibe | 2004-03-30 |
| 6586887 | High-frequency power supply apparatus for plasma generation apparatus | Yasuo Oogoshi, Tadamitsu Kanekiyo, Tsuyoshi Umemoto | 2003-07-01 |
| 5177677 | Power conversion system | Kiyoshi Nakata, Akira Kimura, Yoshio Tsutsui, Kiyoshi Nakamura, Atsushi Abe | 1993-01-05 |
| 5125347 | Power supply system for a linear motor type transportation system | Toyoharu Uchiyama, Kiyoshi Nakamura, Akira Kimura, Shigeyoshi Koike, Koumei Miyairi | 1992-06-30 |