Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11232932 | Plasma processing apparatus and plasma processing method | Masatoshi KAWAKAMI, Kohei Sato, Yasushi Sonoda, Masahiro Nagatani | 2022-01-25 |
| 7125730 | Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same | Youji Takahashi, Tsutomu Iida, Tsuyoshi Umemoto | 2006-10-24 |
| 7025895 | Plasma processing apparatus and method | Youji Takahashi | 2006-04-11 |
| 6713885 | Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same | Youji Takahashi, Tsutomu Iida, Tsuyoshi Umemoto | 2004-03-30 |