Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347656 | Plasma processing apparatus | Naoki Yasui, Motohiro Tanaka, Koichi Yamamoto | 2025-07-01 |
| 12094781 | Manufacturing method of three-dimensional semiconductor device | Makoto Miura, Kiyohiko Sato, Satoshi Sakai | 2024-09-17 |
| D1008986 | Ion shield plate for plasma processing apparatus | Yusuke Nakatani, Kazuumi Tanaka, Masahiro Yamaoka, Taku Iwase | 2023-12-26 |
| 11776792 | Plasma processing apparatus and plasma processing method | Shunsuke Tashiro, Takashi Uemura, Shengnan Yu, Kiyohiko Sato, Masahiro Nagatani | 2023-10-03 |
| 11387110 | Plasma processing apparatus and plasma processing method | — | 2022-07-12 |
| 11355319 | Plasma processing apparatus | Luke Joseph Himbele, Takashi Uemura, Tomoyoshi Ichimaru, Junya Sasaki | 2022-06-07 |
| 11232932 | Plasma processing apparatus and plasma processing method | Masatoshi KAWAKAMI, Kohei Sato, Masahiro Nagatani, Makoto Kashibe | 2022-01-25 |
| 10699909 | Plasma processing apparatus and plasma processing method | Motohiro Tanaka | 2020-06-30 |
| 10522333 | Vacuum processing apparatus | Yusaku Sakka, Hiromichi Kawasaki, Tsutomu Iida, Hiromitsu Terauchi, Masahiro Nagatani | 2019-12-31 |