Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710619 | Vacuum processing apparatus | Kohei Sato, Akitaka Makino, Kazuumi Tanaka | 2023-07-25 |
| 10998168 | Plasma processing apparatus | Ryoji Nishio, Tadayoshi Kawaguchi | 2021-05-04 |
| 10541115 | Plasma processing apparatus | Ryoji Nishio, Tadayoshi Kawaguchi | 2020-01-21 |
| 10522333 | Vacuum processing apparatus | Hiromichi Kawasaki, Tsutomu Iida, Hiromitsu Terauchi, Masahiro Nagatani, Yasushi Sonoda | 2019-12-31 |
| D847237 | Substrate processing unit | Hiromichi Kawasaki | 2019-04-30 |
| D831085 | Substrate processing unit | Hiromichi Kawasaki | 2018-10-16 |
| D831086 | Substrate processing unit | Hiromichi Kawasaki | 2018-10-16 |
| 8940128 | Plasma processing apparatus | Ryoji Nishio, Ken Yoshioka | 2015-01-27 |