Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522333 | Vacuum processing apparatus | Yusaku Sakka, Hiromichi Kawasaki, Tsutomu Iida, Masahiro Nagatani, Yasushi Sonoda | 2019-12-31 |
| 9831096 | Plasma processing method and plasma processing apparatus | Tsutomu Iida, Yuuzou Oohirabaru | 2017-11-28 |
| 9711375 | Plasma processing apparatus and plasma processing method | Tsutomu Iida, Koichi Yamamoto | 2017-07-18 |