Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600472 | Vacuum processing apparatus and operating method of vacuum processing apparatus | Ryoichi Isomura, Yuusaku Sakka, Kouhei Satou, Takashi Uemura, Satoshi Yamamoto | 2023-03-07 |
| 10522333 | Vacuum processing apparatus | Yusaku Sakka, Tsutomu Iida, Hiromitsu Terauchi, Masahiro Nagatani, Yasushi Sonoda | 2019-12-31 |
| D847237 | Substrate processing unit | Yusaku Sakka | 2019-04-30 |
| 10128141 | Plasma processing apparatus and plasma processing method | Takumi Tandou, Go Miya, Masaru Izawa | 2018-11-13 |
| D831085 | Substrate processing unit | Yusaku Sakka | 2018-10-16 |
| D831086 | Substrate processing unit | Yusaku Sakka | 2018-10-16 |
| 9378929 | Plasma processing apparatus and plasma processing method | Kenji Maeda, Ken Yoshioka, Takahiro Shimomura | 2016-06-28 |
| 8951385 | Plasma processing apparatus and plasma processing method | Kenji Maeda, Ken Yoshioka, Takahiro Shimomura | 2015-02-10 |