Issued Patents All Time
Showing 1–25 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978612 | Plasma processing apparatus | Isao Mori, Naoki Yasui, Norihiko Ikeda, Kazuya Yamada | 2024-05-07 |
| 11915951 | Plasma processing method | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Tatehito Usui, Naoyuki Kofuji +4 more | 2024-02-27 |
| 11842885 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Kenetsu Yokogawa | 2023-12-12 |
| 11835465 | Detecting method and detecting device of gas components and processing apparatus using detecting device of gas components | Yoshifumi Ogawa, Yutaka Kouzuma | 2023-12-05 |
| 11682542 | Plasma processing device | Tooru Aramaki, Kenetsu Yokogawa | 2023-06-20 |
| 11557463 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma +1 more | 2023-01-17 |
| 11515167 | Plasma etching method and plasma processing apparatus | Sumiko Fujisaki, Yoshihide Yamaguchi, Hiroyuki Kobayashi, Kazunori Shinoda, Kohei Kawamura +1 more | 2022-11-29 |
| 11424105 | Plasma processing apparatus | Isao Mori, Naoki Yasui, Norihiko Ikeda, Kazuya Yamada | 2022-08-23 |
| 11276579 | Substrate processing method and plasma processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Yutaka Kouzuma | 2022-03-15 |
| 11217454 | Plasma processing method and etching apparatus | Kazunori Shinoda, Hiroto Otake, Hiroyuki Kobayashi, Kohei Kawamura | 2022-01-04 |
| 10971369 | Plasma processing method and plasma processing apparatus | Miyako Matsui, Tatehito Usui, Kenichi Kuwahara | 2021-04-06 |
| 10937635 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma +1 more | 2021-03-02 |
| 10930476 | Plasma processing device | Tooru Aramaki, Kenetsu Yokogawa | 2021-02-23 |
| 10872779 | Plasma etching method and plasma etching apparatus | Nobuya Miyoshi, Hiroyuki Kobayashi, Kazunori Shinoda, Kohei Kawamura, Kazumasa Ookuma +1 more | 2020-12-22 |
| 10811231 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Kenetsu Yokogawa | 2020-10-20 |
| 10665516 | Etching method and plasma processing apparatus | Miyako Matsui, Kenichi Kuwahara, Naoki Yasui, Tatehito Usui, Takeshi Ohmori | 2020-05-26 |
| 10418254 | Etching method and etching apparatus | Kazunori Shinoda, Naoyuki Kofuji, Hiroyuki Kobayashi, Nobuya Miyoshi, Kohei Kawamura +2 more | 2019-09-17 |
| 10325781 | Etching method and etching apparatus | Kazunori Shinoda, Satoshi Sakai, Nobuya Miyoshi, Hiroyuki Kobayashi, Yutaka Kouzuma +2 more | 2019-06-18 |
| 10290472 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma +1 more | 2019-05-14 |
| 10217611 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Kenetsu Yokogawa | 2019-02-26 |
| 10192720 | Plasma processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Satoshi Sakai | 2019-01-29 |
| 10132207 | Variable valve mechanism for internal combustion engine | Kaori Takehana | 2018-11-20 |
| 10128141 | Plasma processing apparatus and plasma processing method | Takumi Tandou, Go Miya, Hiromichi Kawasaki | 2018-11-13 |
| 10090160 | Dry etching apparatus and method | Masahito Mori, Katsushi Yagi | 2018-10-02 |
| 9704731 | Plasma processing apparatus and plasma processing method | Go Miya, Takumi Tandou | 2017-07-11 |